- אירוע כבר עבר.
Optimizing Metrology Capacity Allocation in Semiconductor Manufacturing
נובמבר 5, 2019 @ 12:00 pm - 1:00 pm
Speaker: Dr. Michael Hassoun, Department of Industrial Engineering and Management, Ariel University
Time: 12:00 – 13:00
Place: Building #3A, lower conference room, floor 2 (floor 1 in the elevator), Ariel University, Ariel
In recent years the cost of metrology tools in semiconductor manufacturing plants (fabs) have skyrocketed. As a result, not all lots can be measured, and maximizing the metrology added value by selecting the right lots to measure becomes critical. In a series of models that share common features, we have tackled a number of industrial cases that will be presented and discussed:
- A unique metrology tool is assigned to the control of several heterogeneous production machines. The problem is formulated and solved as a Multiple Choice Knapsack Problem.
- Several identical metrology tools are assigned to the control of several heterogeneous production machines. The resulting problem is formulated as a Multiple-Choice Multiple-Knapsack Problem.
- A unique metrology tool is assigned to the control of several heterogeneous production machines in a setup considering the formation of a queue in front of the metrology tool. The impact of the added loss is incorporated and we reach recommendations pertaining to the adequate level of metrology utilization.
This work was conducted jointly with Prof. Stephane Dauzere-Peres from Ecole des Mines de Saint-Etienne.
Michael Hassoun is a lecturer at the Industrial Engineering Department of the Ariel University, Israel. His research interests focus on modeling and management of production systems, with a special interest in Semiconductor manufacturing. He earned his Ph.D. and M.Sc. in Industrial Engineering from Ben-Gurion University of the Negev, Israel, and his B.Sc. in Mechanical Engineering from the Technion, Israel. He was a postdoctoral fellow at the University of Michigan in 2009.